Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US16282095Application Date: 2019-02-21
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Publication No.: US10685981B2Publication Date: 2020-06-16
- Inventor: Hiroshi Kanno , Tomofumi Zushi
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: Toshiba Memory Corporation
- Current Assignee: Toshiba Memory Corporation
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@110251a3
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L27/11582 ; H01L27/11556 ; H01L21/311

Abstract:
A semiconductor memory device according to an embodiment includes a base portion, a laminated body, a second conductive layer, and a columnar body. The columnar body includes a semiconductor body and a charge storage film. The semiconductor body includes a first region and a second region. The first region extends from a connection portion between the semiconductor body and the first semiconductor portion to the inside of the second conductive layer. The first region includes a first material. The second region is positioned closer to the laminated body than the first region is and is configured such that at least a portion is present within the second conductive layer. The second region does not include the first material or has a concentration of the first material which is lower than that in the first region. A first outer circumferential length of the semiconductor body within the second conductive layer is larger than a second outer circumferential length of the semiconductor body on a first surface which is an interface between the second conductive layer and the laminated body.
Public/Granted literature
- US20200083247A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2020-03-12
Information query
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