Invention Grant
- Patent Title: Fabrication of semiconductor device using a shared material in a phase-change material (PCM) switch region and a resonator region
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Application No.: US16387171Application Date: 2019-04-17
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Publication No.: US10686010B2Publication Date: 2020-06-16
- Inventor: Gregory P. Slovin , Nabil El-Hinnawy , Jefferson E. Rose , David J. Howard
- Applicant: Newport Fab, LLC
- Applicant Address: US CA Newport Beach
- Assignee: Newport Fab, LLC
- Current Assignee: Newport Fab, LLC
- Current Assignee Address: US CA Newport Beach
- Agency: Farjami & Farjami LLP
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00 ; H01L27/20 ; H01L41/18 ; H01L41/09 ; H01L41/29

Abstract:
In fabricating a semiconductor device, a shared material is formed in a resonator region of the semiconductor device and in a phase-change material (PCM) switch region of the semiconductor device. A portion of the shared material is removed to concurrently form a heat spreader comprising the shared material in the PCM switch region and a piezoelectric segment comprising the shared material in the resonator region. The piezoelectric segment in the resonator region and the heat spreader in the PCM switch region are situated at substantially the same level in the semiconductor device. The PCM switch region includes a heating element between the heat spreader and a PCM. The resonator region includes the piezoelectric segment between two electrodes.
Public/Granted literature
Information query
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