Invention Grant
- Patent Title: High voltage resistor with high voltage junction termination
-
Application No.: US15185735Application Date: 2016-06-17
-
Publication No.: US10686032B2Publication Date: 2020-06-16
- Inventor: Ru-Yi Su , Fu-Chih Yang , Chun Lin Tsai , Chih-Chang Cheng , Ruey-Hsin Liu
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/06 ; H01L29/40 ; H01L29/861 ; H01L49/02 ; H01L27/08 ; H01L23/535 ; H01L29/36 ; H01L29/78

Abstract:
High voltage semiconductor devices are described herein. An exemplary semiconductor device includes a first doped region and a second doped region disposed in a substrate. The first doped region and the second doped region are oppositely doped and adjacently disposed in the substrate. A first isolation structure and a second isolation structure are disposed over the substrate, such that each are disposed at least partially over the first doped region. The first isolation structure is spaced apart from the second isolation structure. A resistor is disposed over a portion of the first isolation structure and electrically coupled to the first doped region. A field plate disposed over a portion of the second doped region and electrically coupled to the second doped region.
Public/Granted literature
- US20160293694A1 HIGH VOLTAGE RESISTOR WITH HIGH VOLTAGE JUNCTION TERMINATION Public/Granted day:2016-10-06
Information query
IPC分类: