- Patent Title: Structure and formation method of semiconductor device structure
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Application No.: US16443184Application Date: 2019-06-17
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Publication No.: US10686060B2Publication Date: 2020-06-16
- Inventor: Che-Cheng Chang , Jui-Ping Chuang , Chen-Hsiang Lu , Wei-Ting Chen , Yu-Cheng Liu
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L21/8238 ; H01L27/092 ; H01L29/06 ; H01L29/423 ; H01L29/08 ; H01L29/16 ; H01L29/161 ; H01L29/165 ; H01L29/24 ; H01L29/267 ; H01L29/49 ; H01L29/51 ; H01L21/311 ; H01L21/762

Abstract:
Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a fin structure over a semiconductor substrate and a gate stack covering a portion of the fin structure. The gate stack includes a work function layer and a gate dielectric layer. The semiconductor device structure also includes an isolation element over the semiconductor substrate and adjacent to the gate stack. The isolation element is in direct contact with the work function layer and the gate dielectric layer, and a lower width of the isolation element is greater than an upper width of the isolation element.
Public/Granted literature
- US20190305115A1 Structure and Formation Method of Semiconductor Device Structure Public/Granted day:2019-10-03
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