Invention Grant
- Patent Title: Secondary battery mounted chip manufacturing method
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Application No.: US15749306Application Date: 2016-06-20
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Publication No.: US10686210B2Publication Date: 2020-06-16
- Inventor: Kazuyuki Tsunokuni , Tatsuo Inoue , Tomokazu Saitoh , Juri Ogasawara , Takashi Tonokawa , Takuo Kudoh
- Applicant: KABUSHIKI KAISHA NIHON MICRONICS
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA NIHON MICRONICS
- Current Assignee: KABUSHIKI KAISHA NIHON MICRONICS
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4c50b7c4
- International Application: PCT/JP2016/068219 WO 20160620
- International Announcement: WO2017/022347 WO 20170209
- Main IPC: H01L27/04
- IPC: H01L27/04 ; H01M10/04 ; H01L21/8234 ; H01L27/06 ; H01L21/822 ; H01L21/77

Abstract:
A method for manufacturing oxide semiconductor secondary cells concurrently and evenly on a plurality of chips. A method for manufacturing a chip on which an oxide semiconductor secondary cell is mounted, the oxide semiconductor secondary cell that is formed by layering a first electrode, a charging function layer, and a second electrode being layered on a circuit. The method includes a layering process to layer and form the oxide semiconductor secondary cells integrally at regions corresponding to a plurality of chips formed on a wafer without separately forming oxide semiconductor secondary cells at regions corresponding to the respective chips, and a separating process to perform separation into individual oxide semiconductor secondary cells corresponding to the respective chips by performing pattern etching on the integrally-formed oxide semiconductor secondary cells to eliminate regions not corresponding to the respective chips except for regions corresponding to the respective chips.
Public/Granted literature
- US20180226674A1 SECONDARY BATTERY MOUNTED CHIP MANUFACTURING METHOD Public/Granted day:2018-08-09
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