Invention Grant
- Patent Title: Light irradiation apparatus, optical evaluation apparatus, and article manufacturing method
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Application No.: US16454542Application Date: 2019-06-27
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Publication No.: US10686995B2Publication Date: 2020-06-16
- Inventor: Takanori Uemura
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@27183e0a
- Main IPC: G01N21/93
- IPC: G01N21/93 ; G01B11/00 ; G02B26/10 ; G06T3/00 ; G06T5/00 ; H04N5/235 ; G01N21/88

Abstract:
A light irradiation apparatus for irradiating an object with light, includes a plurality of line-shaped light blockers arranged at a predetermined center-to-center interval, and configured to at least partially block light, and a plurality of line-shaped light irradiators arranged to overlap some of the plurality of light blockers so as to irradiate the object with light. The plurality of light irradiators are arranged to form a period not less than twice as large as the center-to-center interval of the plurality of light blockers.
Public/Granted literature
- US20200014835A1 LIGHT IRRADIATION APPARATUS, OPTICAL EVALUATION APPARATUS, AND ARTICLE MANUFACTURING METHOD Public/Granted day:2020-01-09
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