Invention Grant
- Patent Title: Polishing apparatus
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Application No.: US15714938Application Date: 2017-09-25
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Publication No.: US10688620B2Publication Date: 2020-06-23
- Inventor: Hiroyuki Shinozaki , Yuta Suzuki , Taro Takahashi , Seiji Katsuoka , Masahiro Hatakeyama
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4193ae1d com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@21b2557c com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6a2c91bd
- Main IPC: B24B37/013
- IPC: B24B37/013 ; B24B37/10 ; B24B49/10 ; B24B49/16 ; B24B37/04 ; B24B37/32

Abstract:
In a scheme in which a top ring is held to an end portion of a swing arm, the present invention improves accuracy of polishing end point detection. A polishing apparatus for polishing between a polishing pad 10 and a semiconductor wafer 16 disposed opposed to the polishing pad 10 includes a polishing table 30A for holding the polishing pad 10 and a top ring 31A for holding the semiconductor wafer 16. A swing shaft motor 14 swings a swing arm 110 for holding the top ring 31A. The arm torque detection section 26 detects arm torque applied to the swing arm 110. An end point detection section 28 detects a polishing end point indicating an end of polishing based on the detected arm torque.
Public/Granted literature
- US20180093360A1 POLISHING APPARATUS AND POLISHING METHOD Public/Granted day:2018-04-05
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