Invention Grant
- Patent Title: Etchant composition with high selectivity to silicon nitride
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Application No.: US16270320Application Date: 2019-02-07
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Publication No.: US10689572B2Publication Date: 2020-06-23
- Inventor: Sok Ho Lee , Jung Hwan Song , Seong Sik Jeon , Sung Il Jo , Byeoung Tak Kim , Na Han , Ah Hyeon Lim , Junwoo Lee , Min Keun Lee , Joon Won Kim , Hyungsoon Park , Pilgu Kang , Youngmee Kang , Suyeon Lee
- Applicant: LTCAM CO., LTD. , SK Hynix Inc.
- Applicant Address: KR Pyeongtaek-si, Gyeonggi-do KR Icheon-si, Gyeonggi-do
- Assignee: LTCAM CO., LTD.,SK HYNIX INC.
- Current Assignee: LTCAM CO., LTD.,SK HYNIX INC.
- Current Assignee Address: KR Pyeongtaek-si, Gyeonggi-do KR Icheon-si, Gyeonggi-do
- Agency: Rabin & Berdo, P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@b17b028
- Main IPC: C09K13/06
- IPC: C09K13/06 ; H01L21/311 ; H01L21/302 ; H01L21/306 ; C09K13/00

Abstract:
Provided is an etchant composition for a silicon nitride film, and more particularly, to an etchant composition with a high selectivity to a silicon nitride film, which is used to etch away a silicon nitride film in semiconductor process and which selectively has a high etching rate for the silicon nitride film compared to a silicon oxide film in a high temperature etch process, in which the etchant composition with the high selectivity selectively etches the silicon nitride film at a selectivity of 2000:1 or higher between the silicon nitride film and the silicon oxide film which are in a stack structure, and minimizes damages to the silicon oxide film and etching rate, and does not cause re-growth of the silicon oxide film over the process time.
Public/Granted literature
- US20190249082A1 ETCHANT COMPOSITION WITH HIGH SELECTIVITY TO SILICON NITRIDE Public/Granted day:2019-08-15
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