Invention Grant
- Patent Title: Sensor element, sensor, electronic apparatus, and vehicle
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Application No.: US15928623Application Date: 2018-03-22
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Publication No.: US10690500B2Publication Date: 2020-06-23
- Inventor: Ryuta Nishizawa , Keiichi Yamaguchi
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2a8e6a6d com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@42e1fb58
- Main IPC: G01C19/5642
- IPC: G01C19/5642 ; G01C19/5621 ; G01C19/5607 ; G01C19/5628
Abstract:
A sensor element includes a base portion, a drive arm that extends from the base portion or a portion which is connected to the base portion, and a detection arm that extends from the base portion. The drive arm includes a drive arm portion that extends from the base portion or a portion which is connected to the base portion, and a drive weight portion that is provided on a front end side with respect to the drive arm portion and has a larger width than the drive arm portion. When a length of the drive weight portion in an extending direction of the drive arm is referred to as DHL and a width of the drive weight portion in a direction orthogonal to the extending direction in a planar view is referred to as DHW, a relationship of 1.5≤DHL/DHW is satisfied.
Public/Granted literature
- US20180283865A1 SENSOR ELEMENT, SENSOR, ELECTRONIC APPARATUS, AND VEHICLE Public/Granted day:2018-10-04
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