Invention Grant
- Patent Title: Crystal analysis apparatus and crystal analysis method
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Application No.: US15905326Application Date: 2018-02-26
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Publication No.: US10692206B2Publication Date: 2020-06-23
- Inventor: Masako Kodera
- Applicant: KABUSHIKI KAISHA TOSHIBA , TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA,TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
- Current Assignee: KABUSHIKI KAISHA TOSHIBA,TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Kim & Stewart LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@718d845d
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G06T7/00 ; H01L21/66 ; G06T7/40 ; H01L29/16 ; H01L29/205 ; H01L29/20

Abstract:
A crystal analysis apparatus includes a first storage unit storing a crystal lattice image of a crystal region of a sample and a reference crystal lattice image for the crystal region of the sample. A first image processing unit is configured to generate a moiré image from the crystal lattice image and the reference crystal lattice image. A second storage unit stores a predetermined correspondence relationship between a moiré fringe pattern in the moiré image and a crystal defect in the crystal region or a predetermined correspondence relationship between the moiré fringe pattern in the moiré image and a crystal strain in the crystal region. An analysis unit is configured to compare the moiré fringe pattern in the moiré image to predetermined correspondence relationships stored in the second storage unit.
Public/Granted literature
- US20190005635A1 CRYSTAL ANALYSIS APPARATUS AND CRYSTAL ANALYSIS METHOD Public/Granted day:2019-01-03
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