Invention Grant
- Patent Title: Methods of forming memory arrays
-
Application No.: US16439520Application Date: 2019-06-12
-
Publication No.: US10692871B2Publication Date: 2020-06-23
- Inventor: Werner Juengling
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/66 ; H01L27/108 ; G11C11/409 ; H01L29/78

Abstract:
Some embodiments include a memory device. The device has a fin with a first source/drain region, a second source/drain region and a channel region. The first source/drain region extends to a first height. The second source/drain region extends to a second height less than the first height. The channel region extends along a trough between the first and second source/drain regions. A charge-storage device is over the first source/drain region. A first sense/access line is along a sidewall of the fin and is spaced from the channel region by dielectric material. A second sense/access line is over the second source/drain region. An uppermost surface of the second sense/access line is beneath an uppermost surface of the first source/drain region. Some embodiments include memory arrays, and some embodiments include methods of forming memory arrays.
Public/Granted literature
- US20190296021A1 Memory Devices, Memory Arrays, and Methods of Forming Memory Arrays Public/Granted day:2019-09-26
Information query
IPC分类: