Invention Grant
- Patent Title: Gate formation scheme for nanosheet transistors having different work function metals and different nanosheet width dimensions
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Application No.: US16515708Application Date: 2019-07-18
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Publication No.: US10692873B2Publication Date: 2020-06-23
- Inventor: Takashi Ando , Ruqiang Bao , Pouya Hashemi , Choonghyun Lee
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L29/06 ; H01L21/02 ; H01L29/423 ; H01L21/3213 ; H01L21/285 ; H01L21/8238 ; H01L29/66 ; H01L27/092 ; H01L21/3065 ; H01L21/311

Abstract:
Embodiments of the invention are directed to a configuration of nanosheet FET devices formed on a substrate. A non-limiting example of the nanosheet FET devices includes a first nanosheet FET having a first channel nanosheet, a second channel nanosheet over the first nanosheet, a first gate structure around the first channel nanosheet, and a second gate structure around the second channel nanosheet, wherein a first air gap is between the first gate structure and the second gate structure. The nanosheet FET devices further include a second nanosheet FET having a third channel nanosheet, a fourth channel nanosheet over the third nanosheet, a third gate structure around the third channel nanosheet, and a fourth gate structure around the fourth channel nanosheet, wherein a second air gap is between the third gate structure and the fourth gate structure.
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