Invention Grant
- Patent Title: Array substrate, manufacturing method thereof and display panel
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Application No.: US15578299Application Date: 2017-08-29
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Publication No.: US10692948B2Publication Date: 2020-06-23
- Inventor: Songshan Li
- Applicant: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
- Applicant Address: CN Wuhan
- Assignee: WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee: WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: Hemisphere Law, PLLC
- Agent Zhigang Ma
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@395bfde2
- International Application: PCT/CN2017/099484 WO 20170829
- International Announcement: WO2019/015023 WO 20190124
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L27/32 ; H01L51/56 ; H01L51/52 ; H01L29/49 ; H01L27/12

Abstract:
An array substrate is provided, including a substrate, a driver thin film transistor and a switch thin film transistor disposed on the substrate, the driver thin film transistor and the switch thin film transistor both include a gate, a gate insulating layer, an active layer, a source, and a drain. A barrier layer is disposed between the gate and the gate insulating layer of the driver thin film transistor. A manufacturing method thereof includes forming a barrier layer on the gate of the driver thin film transistor. Compared with existing arts, forming a barrier layer between the gate and the gate insulating layer of the driver thin film transistor to prevent its active layer from water and active oxygen ions affections can improve the electrical property and reliability of the thin film transistor, and ensure the normal operation for driving the driver thin film transistor of organic light emitting diode.
Public/Granted literature
- US20190221626A1 ARRAY SUBSTRATE, MANUFACTURING METHOD THEREOF AND DISPLAY PANEL Public/Granted day:2019-07-18
Information query
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