Invention Grant
- Patent Title: Plating device
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Application No.: US16065503Application Date: 2016-12-20
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Publication No.: US10697079B2Publication Date: 2020-06-30
- Inventor: Wataru Yamamoto , Katsunori Akiyama , Chikako Suzuki , Masazumi Ishiguro
- Applicant: YAMAMOTO-MS Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: Yamamoto-MS Co., Ltd.
- Current Assignee: Yamamoto-MS Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Marbury Law Group, PLLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3cbd303
- International Application: PCT/JP2016/087860 WO 20161220
- International Announcement: WO2017/110765 WO 20170629
- Main IPC: C25D5/08
- IPC: C25D5/08 ; H01L21/288 ; C25D17/02 ; C25D17/12 ; C25D17/00 ; C25D21/10 ; C25D7/12 ; C25D17/10

Abstract:
A plating device comprising: a water tank into which a plating solution is poured; a tubular nozzle being disposed in the water tank and serving as an anode; a to-be-plated object being disposed in the water tank so as to be opposed to the nozzle and serving as a cathode; a direct-current power source to apply a voltage between the nozzle and the to-be-plated object; and a pump to circulate the plating solution such that the plating solution poured into the water tank passes through the nozzle and is ejected onto the to-be-plated object. A perforated plate member, which includes a through-hole having a smaller diameter than the inside diameter of the nozzle, is arranged on the inflow side of the nozzle such that the through-hole is opposed to an open region of the nozzle.
Public/Granted literature
- US20190003069A1 PLATING DEVICE Public/Granted day:2019-01-03
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