Invention Grant
- Patent Title: Physical quantity sensor, method for manufacturing physical quantity sensor, physical quantity sensor device, electronic apparatus, and vehicle
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Application No.: US15948174Application Date: 2018-04-09
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Publication No.: US10697773B2Publication Date: 2020-06-30
- Inventor: Makoto Furuhata , Kei Kanemoto
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4e725dd3
- Main IPC: G01C19/00
- IPC: G01C19/00 ; G01P3/00 ; B60W30/02 ; B60W10/22 ; G01C19/5733 ; G01P3/22 ; G01C19/5769 ; B60W10/184 ; B81B3/00 ; G01C19/574
Abstract:
A physical quantity sensor includes a driven section and a drive spring that supports the driven section so that the driven section is displaceable in a first direction. The drive spring has a serpentine shape and includes a plurality of spring structures extending in a second direction that intersects a first direction. At least one of the spring structures has a thin section that is thinner in a third direction that intersects the first and second directions than the other portions of the drive spring.
Public/Granted literature
Information query
