Invention Grant
- Patent Title: Gas sensor
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Application No.: US15724971Application Date: 2017-10-04
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Publication No.: US10697920B2Publication Date: 2020-06-30
- Inventor: Yoshikazu Shibasaki , Hirotaka Obata
- Applicant: Riken Keiki Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: RIKEN KEIKI CO., LTD.
- Current Assignee: RIKEN KEIKI CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Lucas & Mercanti, LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2cd7b0fd
- Main IPC: G01N27/16
- IPC: G01N27/16 ; G01N33/00

Abstract:
Disclosed is a gas sensor having high detection sensitivity, capable of detecting a gas at a low concentration and achieving lower power consumption. In the gas sensor including a gas detection element disposed on a thin-film insulator layer, the gas detection element includes: a heater layer provided on the thin-film insulator layer; and a gas detection layer having a thin-film thermistor part and an electrode part in contact with the thin-film, thermistor part, the gas detection layer being provided on the heater layer so as to be electrically insulated from the heater layer. The gas sensor is configured to detect a temperature change due to contact of a gas with the gas detection element on the basis of a change in resistance value in the thin-film thermistor part. The thin-film thermistor part preferably comprises a composite metal oxide containing Fe2O3, TiO2 and MgO.
Public/Granted literature
- US20180106745A1 GAS SENSOR Public/Granted day:2018-04-19
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