Invention Grant
- Patent Title: Probe systems for testing a device under test
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Application No.: US16143856Application Date: 2018-09-27
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Publication No.: US10698002B2Publication Date: 2020-06-30
- Inventor: Christopher Storm , Michael E. Simmons , Bryan Conrad Bolt , Gavin Neil Fisher , Anthony Lord , Kazuki Negishi
- Applicant: FormFactor Beaverton, Inc.
- Applicant Address: US OR Beaverton
- Assignee: FormFactor Beaverton, Inc.
- Current Assignee: FormFactor Beaverton, Inc.
- Current Assignee Address: US OR Beaverton
- Agency: Dascenzo Intellectual Property Law, P.C.
- Main IPC: G01R1/06
- IPC: G01R1/06 ; G01R1/067 ; G01R1/04 ; H01L21/687 ; G01R31/28

Abstract:
Probe systems for testing a device under test are disclosed herein. The probe systems include a platen that defines an upper surface, an opposed lower surface, and a platen aperture. The probe systems also include a chuck that defines a support surface configured to support a device under test. The probe systems further include a lower enclosure extending from the lower surface of the platen and an upper enclosure extending from the upper surface of the platen. The upper enclosure includes a side wall that defines a side wall aperture, and the side wall and the platen define an intersection angle of at least 30 degrees and at most 60 degrees. The probe systems also include a manipulator, a probe shaft arm, a probe assembly, a test head, and an electrical conductor.
Public/Granted literature
- US20190101567A1 PROBE SYSTEMS FOR TESTING A DEVICE UNDER TEST Public/Granted day:2019-04-04
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