Invention Grant
- Patent Title: Wafer scale bonded active photonics interposer
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Application No.: US15891847Application Date: 2018-02-08
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Publication No.: US10698156B2Publication Date: 2020-06-30
- Inventor: Douglas Coolbaugh , Douglas La Tulipe , Gerald Leake
- Applicant: The Research Foundation for The State University of New York
- Applicant Address: US NY Albany
- Assignee: The Research Foundation for the State University of New York
- Current Assignee: The Research Foundation for the State University of New York
- Current Assignee Address: US NY Albany
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Agent George S. Blasiak, Esq.
- Main IPC: G02B6/12
- IPC: G02B6/12 ; H01L21/48 ; H01L23/498 ; H01L31/02 ; H01L31/0232 ; G02B6/13

Abstract:
There is set forth herein a method including building an interposer base structure on a first wafer having a first substrate, wherein the building an interposer base structure includes fabricating a plurality of through vias that extend through the first substrate and fabricating within an interposer base dielectric stack formed on the first substrate one or more metallization layer; building a photonics structure on a second wafer having a second substrate, wherein the building a photonics structure includes fabricating within a photonics device dielectric stack formed on the second substrate one or more photonics device; and bonding the photonics structure to the interposer base structure to define an interposer having the interposer base structure and one or more photonics device fabricated within the photonics device dielectric stack. There is set forth herein an optoelectrical system including a substrate; an interposer dielectric stack formed on the substrate, the interposer dielectric stack including a base interposer dielectric stack, and a photonics device dielectric stack, and a bond layer dielectric stack that integrally bonds the photonics device dielectric stack to the base interposer dielectric stack.
Public/Granted literature
- US20180314003A1 WAFER SCALE BONDED ACTIVE PHOTONICS INTERPOSER Public/Granted day:2018-11-01
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