Invention Grant
- Patent Title: Reflection-type exposure mask
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Application No.: US15693284Application Date: 2017-08-31
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Publication No.: US10698311B2Publication Date: 2020-06-30
- Inventor: Takeshi Yamane , Kosuke Takai
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Tokyo
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Kim & Stewart LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6d418e22
- Main IPC: G03F1/24
- IPC: G03F1/24 ; G03F7/20 ; G03F1/26 ; G03F1/72

Abstract:
A reflection-type exposure mask includes a light reflector provided in a pattern on a substrate. The light reflector has a multilayer structure including first-type layers and second-type layers that are alternately stacked. The second-type layers have a refractive index higher at an extreme ultraviolet wavelength than a refractive index of the first-type layer at the extreme ultraviolet wavelength. A light transmitting medium is on a side surface of the light reflector.
Public/Granted literature
- US20180275506A1 REFLECTION-TYPE EXPOSURE MASK Public/Granted day:2018-09-27
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