Invention Grant
- Patent Title: Performance monitoring of design-based alignment
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Application No.: US16400756Application Date: 2019-05-01
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Publication No.: US10698325B2Publication Date: 2020-06-30
- Inventor: Bjorn Brauer
- Applicant: KLA-TENCOR CORPORATION
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Hodgson Russ LLP
- Main IPC: G06F9/00
- IPC: G06F9/00 ; G03F9/00 ; G01N21/93 ; G01N21/956 ; G03F7/20 ; G01N21/95 ; H01L21/66

Abstract:
Alignment can be monitored by positioning at least one alignment verification location per alignment frame. The alignment verification location is a coordinate within the alignment frame. A distance between each of the alignment verification locations and a closest instance of an alignment target is determined. An alignment score can be determined based on the distance. The alignment score can include a number of the alignment frames between the alignment verification location and the alignment target. If the alignment score is below a threshold, then alignment setup can be performed.
Public/Granted literature
- US20190361363A1 PERFORMANCE MONITORING OF DESIGN-BASED ALIGNMENT Public/Granted day:2019-11-28
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