Invention Grant
- Patent Title: Plasma processing apparatus, method of operating plasma processing apparatus, and power supply device
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Application No.: US15309399Application Date: 2015-06-01
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Publication No.: US10699883B2Publication Date: 2020-06-30
- Inventor: Satoru Teruuchi
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@74324533
- International Application: PCT/JP2015/065771 WO 20150601
- International Announcement: WO2015/190336 WO 20151217
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H05H1/46 ; H01L21/02 ; H01L21/3065 ; H01L21/67 ; H05B3/28 ; F27D11/02 ; H01L21/683 ; H05B3/62

Abstract:
A plasma processing apparatus according to an embodiment includes a processing container, a mounting table, a plurality of heaters, and a power supply device. The mounting table is provided in the processing container. The plurality of heaters are provided in the mounting table. The power supply device supplies electric power to the plurality of heaters. The power supply device includes a plurality of transformers and a plurality of zero-cross control type solid state relays (SSRs). The plurality of transformers are configured to step down a voltage from an alternating-current power source. Each of the plurality of transformers includes a primary coil and a secondary coil. The primary coil is connected to the alternating-current power source. Each of the plurality of SSRs is provided between one corresponding heater among the plurality of heaters and the secondary coil of one corresponding transformer among the plurality of transformers.
Public/Granted literature
- US20170110297A1 PLASMA PROCESSING APPARATUS, METHOD OF OPERATING PLASMA PROCESSING APPARATUS, AND POWER SUPPLY DEVICE Public/Granted day:2017-04-20
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