Invention Grant
- Patent Title: Plasma processing apparatus and plasma processing method
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Application No.: US14625931Application Date: 2015-02-19
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Publication No.: US10699909B2Publication Date: 2020-06-30
- Inventor: Yasushi Sonoda , Motohiro Tanaka
- Applicant: HITACHI HIGH-TECH CORPORATION
- Applicant Address: JP Tokyo
- Assignee: HITACH HIGH-TECH CORPORATION
- Current Assignee: HITACH HIGH-TECH CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge, P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2c52215d
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/308 ; H01L21/3065

Abstract:
A plasma processing apparatus includes a processing chamber configured to perform a plasma processing on a sample, a first radio frequency power supply configured to generate a plasma, a sample stage configured to place the sample thereon, a second radio frequency power supply configured to supply a radio frequency power to the sample stage, a mass flow controller configured to supply a gas into the processing chamber, and a control device configured to change the radio frequency power supplied from the first radio frequency power supply or the second radio frequency power supply based on a change of plasma impedance after a first gas is switched to a second gas.
Public/Granted literature
- US20160133530A1 PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD Public/Granted day:2016-05-12
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