Invention Grant
- Patent Title: Chemical supply unit and apparatus for treating a substrate
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Application No.: US15484377Application Date: 2017-04-11
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Publication No.: US10699918B2Publication Date: 2020-06-30
- Inventor: Buyoung Jung , Jin Tack Yu , Gil Hun Song , Sun Yong Park
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-Do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-Do
- Agency: Carter, DeLuca & Farrell LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@21e1533d
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B05B1/14 ; B08B3/08

Abstract:
Provided is a substrate treating apparatus. The substrate treating apparatus comprises: a housing having a treating space therein; a spin head for supporting and rotating a substrate in the treating space; and a chemical supply unit having an injection nozzle for supplying a chemical to the substrate which is supported by the spin head, wherein the injection nozzle comprises a nozzle body, and wherein the nozzle body comprises an inner space for receiving a chemical and minute holes which are connected with the inner space for discharging the chemicals to downward.
Public/Granted literature
- US20170316958A1 CHEMICAL SUPPLY UNIT AND APPARATUS FOR TREATING A SUBSTRATE Public/Granted day:2017-11-02
Information query
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