Invention Grant
- Patent Title: Semiconductor test structure and method for forming the same
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Application No.: US15804165Application Date: 2017-11-06
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Publication No.: US10699973B2Publication Date: 2020-06-30
- Inventor: Anthony K. Stamper , Patrick S. Spinney , Jeffrey C. Stamm
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDERS INC.
- Current Assignee: GLOBALFOUNDERS INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Anthony Canale
- Main IPC: H01L23/544
- IPC: H01L23/544 ; H01L23/00 ; H01L21/66 ; H01L21/78

Abstract:
A test structure for semiconductor chips of a wafer, and the method of forming the same is included. The test structure may include a first portion disposed within a corner area of a first chip on the wafer, and at least another portion disposed within another corner of another chip on the wafer, wherein before dicing of the chips, the portions form the test structure. The test structure may include an electronic test structure or an optical test structure. The electronic test structure may include probe pads, each probe pad positioned across two or more corner areas of two or more chips. The corner areas including the test structures disposed therein may be removed from the chips during a dicing of the chips.
Public/Granted literature
- US20190139841A1 SEMICONDUCTOR TEST STRUCTURE AND METHOD FOR FORMING THE SAME Public/Granted day:2019-05-09
Information query
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