Invention Grant
- Patent Title: Methods and systems for inhibiting bonding materials from contaminating a semiconductor processing tool
-
Application No.: US15686963Application Date: 2017-08-25
-
Publication No.: US10700038B2Publication Date: 2020-06-30
- Inventor: Benjamin L. McClain , Jeremy E. Minnich
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Perkins Coie LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L23/00

Abstract:
Methods and systems for inhibiting bonding materials from entering a vacuum system of a semiconductor processing tool are disclosed herein. A semiconductor processing tool configured in accordance with a particular embodiment includes a bondhead having a first port, a second port, a first channel fluidly coupled to the first port, and a second channel fluidly coupled to the second port. The first port and first channel together comprise a first opening extending through the bondhead, and the second port and second channel together comprise a second opening extending through the bondhead. The second opening at least partially surrounds the first opening. A first flow unit is coupled to the first port and is configured to withdraw air from the first opening. A second flow unit is coupled to the second port and is configured to provide fluid to or withdraw fluid from the second opening.
Public/Granted literature
- US20190067238A1 METHODS AND SYSTEMS FOR INHIBITING BONDING MATERIALS FROM CONTAMINATING A SEMICONDUCTOR PROCESSING TOOL Public/Granted day:2019-02-28
Information query
IPC分类: