Invention Grant
- Patent Title: Vertical transport field-effect transistors with uniform threshold voltage
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Application No.: US16158449Application Date: 2018-10-12
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Publication No.: US10700062B2Publication Date: 2020-06-30
- Inventor: ChoongHyun Lee , Kangguo Cheng , Juntao Li , Shogo Mochizuki
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Ryan, Mason & Lewis, LLP
- Agent Vazken Alexanian
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/088 ; H01L29/78 ; H01L29/49 ; H01L29/08 ; H01L21/8234 ; H01L29/06 ; H01L21/28

Abstract:
A semiconductor structure includes a substrate, a plurality of fins disposed over a top surface of the substrate, and a gate stack surrounding a portion of sidewalls of the plurality of fins. The plurality of fins include two or more active device fins comprising a semiconducting material providing vertical transport channels for respective vertical transport field-effect transistors, and two or more edge fins surrounding the two or more active device fins, the two or more edge fins comprising a dielectric material. Thicknesses of one or more layers of the gate stack surrounding the portion of the sidewalls of the two or more edge fins are different than thicknesses of the one or more layers of the gate stack surrounding the portion of the sidewalls of the active device fins. The vertical transport field-effect transistors provided by the active device fins have uniform threshold voltage.
Public/Granted literature
- US20200119010A1 VERTICAL TRANSPORT FIELD-EFFECT TRANSISTORS WITH UNIFORM THRESHOLD VOLTAGE Public/Granted day:2020-04-16
Information query
IPC分类: