Invention Grant
- Patent Title: Vertical memory devices
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Application No.: US16010743Application Date: 2018-06-18
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Publication No.: US10700085B2Publication Date: 2020-06-30
- Inventor: Sung-Min Hwang , Dong-Sik Lee , Joon-Sung Lim
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@69c9ac44
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11568 ; H01L27/11573 ; H01L23/528 ; H01L23/522 ; H01L27/11565 ; H01L27/11575 ; H01L27/1157 ; H01L21/768 ; H01L21/265 ; H01L21/311 ; H01L21/027 ; H01L21/3105 ; H01L21/02 ; H01L21/28

Abstract:
A vertical memory device is provided. The vertical memory device includes a substrate, first gate electrodes, a channel, first wirings, and second wirings. The substrate includes a cell region and a peripheral circuit region. The first gate electrodes are spaced apart from each other in a first direction on the cell region of the substrate, the first direction being substantially perpendicular to the substrate. The channel extends through a portion of the first gate electrodes in the first direction on the cell region. The first wirings are formed on the cell region, and are disposed at first levels that are higher in the first direction than gate electrode levels on which the first gate electrodes are respectively formed. The second wirings are formed on the peripheral circuit region, and are disposed at the first levels and at a second level that is higher than the gate electrode levels.
Public/Granted literature
- US20190035808A1 VERTICAL MEMORY DEVICES Public/Granted day:2019-01-31
Information query
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