Invention Grant
- Patent Title: Spin-orbit torque magnetoresistive random access memory and method for manufacturing the same
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Application No.: US16411431Application Date: 2019-05-14
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Publication No.: US10700124B1Publication Date: 2020-06-30
- Inventor: Meiyin Yang , Jun Luo , Tengzhi Yang , Jing Xu
- Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Applicant Address: CN Beijing
- Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: Goodwin Procter LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@786807c3
- Main IPC: H01L27/22
- IPC: H01L27/22 ; H01L43/08 ; H01L43/10 ; H01L43/12

Abstract:
A spin-orbit torque magnetoresistive random access memory, and a method for manufacturing a spin-orbit torque magnetoresistive random access memory are provided. The spin-orbit torque magnetoresistive random access memory includes a spin-orbit coupling layer and a magnetoresistive tunnel junction located on the spin-orbit coupling layer. The magnetoresistive tunnel junction includes a first magnetic layer, a tunneling layer, and a second magnetic layer that are sequentially stacked from bottom to top, and each of the first magnetic layer and the second magnetic layer has perpendicular anisotropy. In a direction of a current in the spin-orbit coupling layer, defects are generated in a part of the magnetoresistive tunnel junction by an ion implantation process.
Public/Granted literature
- US20200212103A1 SPIN-ORBIT TORQUE MAGNETORESISTIVE RANDOM ACCESS MEMORY AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2020-07-02
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