Invention Grant
- Patent Title: Group III nitride semiconductor device with first and second conductive layers
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Application No.: US16178289Application Date: 2018-11-01
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Publication No.: US10700188B2Publication Date: 2020-06-30
- Inventor: Kentaro Chikamatsu
- Applicant: ROHM CO., LTD.
- Applicant Address: JP Kyoto
- Assignee: ROHM CO., LTD.
- Current Assignee: ROHM CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6f8e2acf com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@39972877
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L29/06 ; H01L29/40 ; H01L29/20 ; H01L29/417 ; H01L29/66 ; H01L29/423 ; H01L29/205 ; H01L29/51

Abstract:
A semiconductor device is provided with, a group-III nitride semiconductor layered structure that includes a heterojunction, an insulating layer which has a gate opening that reaches the group-III nitride semiconductor layered structure and which is disposed on the group-III nitride semiconductor layered structure, a gate insulating film that covers the bottom and the side of the gate opening, a gate electrode defined on the gate insulating film inside the gate opening, a source electrode and a drain electrode which are disposed to be spaced apart from the gate electrode so as to sandwich the gate electrode, a first conductive layer embedded in the insulating layer between the gate electrode and the drain electrode, and a second conductive layer that is embedded in the insulating layer above the first conductive layer in a region closer to the drain electrode side than the first conductive layer.
Public/Granted literature
- US20190140086A1 SEMICONDUCTOR DEVICE Public/Granted day:2019-05-09
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