Invention Grant
- Patent Title: Piezoelectric element, manufacturing method thereof, and liquid ejection head
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Application No.: US16229556Application Date: 2018-12-21
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Publication No.: US10700258B2Publication Date: 2020-06-30
- Inventor: Kazuya Kitada , Masayuki Omoto , Tsutomu Asakawa , Hidemichi Furihata
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6fc5ee7a
- Main IPC: B41J2/14
- IPC: B41J2/14 ; H01L41/09 ; B41J2/045 ; H01L41/29 ; B41J2/16 ; H01L41/187 ; H01L41/047 ; H01L41/08 ; H01L41/318
Abstract:
A piezoelectric element includes a substrate; a first electrode formed above the substrate; a piezoelectric layer which contains a composite oxide having a perovskite crystal structure and which is formed above the first electrode; and a second electrode formed above the piezoelectric layer, and the amount of carbon contained in the substrate is 0.26 to less than 14.00 percent by atom.
Public/Granted literature
- US20190198747A1 Piezoelectric Element, Manufacturing Method Thereof, And Liquid Ejection Head Public/Granted day:2019-06-27
Information query
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