Invention Grant
- Patent Title: PCM switch and method of making the same
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Application No.: US15188754Application Date: 2016-06-21
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Publication No.: US10700270B2Publication Date: 2020-06-30
- Inventor: Pavel Borodulin , Nabil Abdel-Meguid El-Hinnawy , Robert Miles Young
- Applicant: Pavel Borodulin , Nabil Abdel-Meguid El-Hinnawy , Robert Miles Young
- Applicant Address: US VA Falls Church
- Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATION
- Current Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATION
- Current Assignee Address: US VA Falls Church
- Agency: Tarolli, Sundheim, Covell & Tumminio LLP
- Main IPC: H01H11/00
- IPC: H01H11/00 ; H01L45/00 ; G11C13/00

Abstract:
One example includes a method for making a switch. The method includes forming an insulating layer over a substrate. The method also includes forming a resistive heating material over the insulating layer. The method also includes depositing a thermally conductive electrically insulating barrier layer over the heating material. The method also includes forming a phase-change material (PCM) component over the barrier layer spaced apart and proximal to the resistive heating material. The method also includes forming a quench layer proximal to at least one of the resistive heating material and the PCM component. The method further includes forming conductive lines from ends of the PCM component and control lines from ends of the resistive heating material.
Public/Granted literature
- US20170365427A1 PCM SWITCH AND METHOD OF MAKING THE SAME Public/Granted day:2017-12-21
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