Invention Grant
- Patent Title: Planar single-crystal phase change material device
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Application No.: US16151738Application Date: 2018-10-04
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Publication No.: US10700274B2Publication Date: 2020-06-30
- Inventor: Guy Cohen
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24 ; G11C11/56 ; G11C13/00

Abstract:
A method of fabricating a phase change material (PCM) device is provided. The method includes disposing a dielectric layer above or below a PCM layer and disposing first and second contacts in a same plane within the dielectric layer with the first contact having a larger contact area than the second contact. The method also includes one of directing a short current pulse from the first contact to the second contact so as to form amorphous-PCM in a region of the PCM layer adjacent to the second contact with crystalline-PCM partially surrounding and in contact with the amorphous-PCM and directing a long current pulse from the first contact to the second contact so as to form crystalline-PCM in the region of the PCM layer adjacent to the second contact.
Public/Granted literature
- US20200111955A1 PLANAR SINGLE-CRYSTAL PHASE CHANGE MATERIAL DEVICE Public/Granted day:2020-04-09
Information query
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