- Patent Title: Semiconductor random access memory and manufacturing method thereof
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Application No.: US15812445Application Date: 2017-11-14
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Publication No.: US10700281B2Publication Date: 2020-06-30
- Inventor: Changzhou Wang , Jiquan Liu
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN Shanghai CN Beijing
- Assignee: Semiconductor Manufacturing (Shanghai) International Corporation,Semiconductor Manufacturing (Beijing) International Corporation
- Current Assignee: Semiconductor Manufacturing (Shanghai) International Corporation,Semiconductor Manufacturing (Beijing) International Corporation
- Current Assignee Address: CN Shanghai CN Beijing
- Agency: Brinks Gilson & Lione
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5b48ebab
- Main IPC: H01L45/00
- IPC: H01L45/00 ; C23C16/06 ; C23C16/34

Abstract:
The present disclosure discloses a resistive random access memory (RRAM) and a method for manufacture the RRAM. The method includes: providing a bottom interconnection layer; forming a bottom dielectric layer above the bottom interconnection layer, the bottom dielectric layer comprising a via through the bottom dielectric layer that exposes a portion of the bottom interconnection layer; and forming a bottom electrode layer in the via, the bottom electrode layer including a first electrode selectively grown above the bottom interconnection layer. The bottom electrode layer manufactured in such a way provides improved filling capability of the bottom electrode layer in the via.
Public/Granted literature
- US20180151801A1 SEMICONDUCTOR RANDOM ACCESS MEMORY AND MANUFACTURING METHOD THEREOF Public/Granted day:2018-05-31
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