Invention Grant
- Patent Title: Bulk acoustic wave resonator
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Application No.: US15793945Application Date: 2017-10-25
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Publication No.: US10700660B2Publication Date: 2020-06-30
- Inventor: John Choy , Chris Feng , Phil Nikkel
- Applicant: Avago Technologies International Sales Pte. Limited
- Applicant Address: SG Singapore
- Assignee: Avago Technologies International Sales Pte. Limited
- Current Assignee: Avago Technologies International Sales Pte. Limited
- Current Assignee Address: SG Singapore
- Agency: Foley & Lardner LLP
- Main IPC: H03H9/54
- IPC: H03H9/54 ; H03H9/02 ; H03H9/17 ; H03H3/02

Abstract:
A bulk acoustic wave (BAW) resonator includes: a substrate; an acoustic reflector disposed in the substrate; a first electrode disposed over the acoustic reflector; a second electrode; and a piezoelectric layer between the first and second electrodes. The second electrode is not disposed between the first electrode and the acoustic reflector. The BAW resonator further includes a block disposed over the substrate and beneath the piezoelectric layer. A contacting overlap of the acoustic reflector, the first electrode, the second electrode and the piezoelectric layer defines an active area of the BAW resonator.
Public/Granted literature
- US20190123708A1 BULK ACOUSTIC WAVE RESONATOR Public/Granted day:2019-04-25
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