Bulk acoustic wave resonator
Abstract:
A bulk acoustic wave (BAW) resonator includes: a substrate; an acoustic reflector disposed in the substrate; a first electrode disposed over the acoustic reflector; a second electrode; and a piezoelectric layer between the first and second electrodes. The second electrode is not disposed between the first electrode and the acoustic reflector. The BAW resonator further includes a block disposed over the substrate and beneath the piezoelectric layer. A contacting overlap of the acoustic reflector, the first electrode, the second electrode and the piezoelectric layer defines an active area of the BAW resonator.
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