Invention Grant
- Patent Title: Acoustic wave device, filter, and multiplexer
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Application No.: US16198284Application Date: 2018-11-21
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Publication No.: US10700662B2Publication Date: 2020-06-30
- Inventor: Shinpei Miura , Satoshi Imasu , Takashi Matsuda , Masafumi Iwaki
- Applicant: TAIYO YUDEN CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Stein IP, LLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@79f4ffe5 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@27bab8d2 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@79ab34dc
- Main IPC: H03H9/145
- IPC: H03H9/145 ; H03H3/08 ; H03H9/02 ; H03H9/25 ; H03H9/64 ; H03H9/72 ; H01L41/047

Abstract:
An acoustic wave device includes: a piezoelectric substrate; and a pair of comb-shaped electrodes that is located on the piezoelectric substrate, includes a metal film, and excites a surface acoustic wave, the metal film being mainly composed of a metal having a melting point equal to or higher than a melting point of Pt, the metal film having a first region in which a crystal grain has a columnar shape and a second region that is located on and/or under the first region in a stacking direction and has less crystallinity than the first region or has an amorphous structure.
Public/Granted literature
- US20190207583A1 ACOUSTIC WAVE DEVICE, FILTER, AND MULTIPLEXER Public/Granted day:2019-07-04
Information query
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