Invention Grant
- Patent Title: Acoustic wave device
-
Application No.: US15655684Application Date: 2017-07-20
-
Publication No.: US10700664B2Publication Date: 2020-06-30
- Inventor: Satoru Matsuda
- Applicant: TAIYO YUDEN CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Chen Yoshimura LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@16e3762e
- Main IPC: H03H9/17
- IPC: H03H9/17 ; H03H9/02

Abstract:
An acoustic wave device includes: a substrate; a piezoelectric film located on the substrate; a lower electrode and an upper electrode facing each other across at least a part of the piezoelectric film; a silicon oxide film located at an opposite side of at least one of the lower electrode and the upper electrode from the piezoelectric film; a first insulating film that is located between the at least one of the lower electrode and the upper electrode and the silicon oxide film and includes a non-oxygen-containing material; and an additional film located at an opposite side of the silicon oxide film from the first insulating film and made of a material different from a material of the silicon oxide film and a material of the first insulating film.
Public/Granted literature
- US20170324397A1 ACOUSTIC WAVE DEVICE Public/Granted day:2017-11-09
Information query
IPC分类: