Invention Grant
- Patent Title: Damping system for a mobile mass of a MEMS device
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Application No.: US16462613Application Date: 2017-11-20
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Publication No.: US10703626B2Publication Date: 2020-07-07
- Inventor: Guillaume Jerome Francois Lehee
- Applicant: SAFRAN , COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris FR Paris
- Assignee: SAFRAN,COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: SAFRAN,COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris FR Paris
- Agency: Sughrue Mion, PLLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@1f0bed50
- International Application: PCT/FR2017/053166 WO 20171120
- International Announcement: WO2018/091851 WO 20180524
- Main IPC: H01L29/82
- IPC: H01L29/82 ; B81B7/00 ; B81B3/00
Abstract:
The invention relates to a damping system for a mobile mass (2) of a MEMS device (1), the system being capable of preventing direct contact between the mass (2) and a surface element (3) of the MEMS device (1), the damping system comprising: a mechanical bumper (4) positioned between the mass (2) and the surface element (3); a system (5) for locking/unlocking the bumper (4), which comprises one branch (51) oriented towards the bumper (4) having a blocking end (53) and a pin joint (54) capable of pivoting the branch (51), the locking/unlocking system (5) defining two subsequent positions of the mass (2).
Public/Granted literature
- US20200062584A1 DAMPING SYSTEM FOR A MOBILE MASS OF A MEMS DEVICE Public/Granted day:2020-02-27
Information query
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