Invention Grant
- Patent Title: Polishing composition for silicon oxide film
-
Application No.: US15511878Application Date: 2015-09-25
-
Publication No.: US10703935B2Publication Date: 2020-07-07
- Inventor: Haruhiko Doi , Koji Kinuta
- Applicant: Kao Corporation
- Applicant Address: JP Tokyo
- Assignee: KAO CORPORATION
- Current Assignee: KAO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@1123137e
- International Application: PCT/JP2015/077030 WO 20150925
- International Announcement: WO2016/047725 WO 20160331
- Main IPC: C09G1/02
- IPC: C09G1/02 ; B24B37/04 ; H01L21/3105 ; C09K3/14

Abstract:
Provided is a polishing composition for a silicon oxide film that can improve the speed of polishing a silicon oxide film. In one or more embodiments, a polishing composition for a silicon oxide film contains: water; a cerium oxide particle; and a compound having in its molecule an amino group and at least one acid group selected from a sulfonic acid group and a phosphonic acid group. In the polishing composition, [the number of moles of the acid group contained in the compound]/[total surface area of the cerium oxide particle] is in a range from 1.6×10−5 mol/m2 to 5.0×10−2 mol/m2.
Public/Granted literature
- US20170292038A1 POLISHING COMPOSITION FOR SILICON OXIDE FILM Public/Granted day:2017-10-12
Information query