Invention Grant
- Patent Title: Quick disconnect resistance temperature detector assembly for rotating pedestal
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Application No.: US15661441Application Date: 2017-07-27
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Publication No.: US10704142B2Publication Date: 2020-07-07
- Inventor: Muhannad Mustafa , Muhammad M. Rasheed , Mario Dan Sanchez , Yu Chang , William Kuang , Vinod Konda Purathe , Manjunatha Koppa
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: C23C16/455
- IPC: C23C16/455 ; G01K7/16 ; C23C16/46 ; G01K13/08 ; G01K1/14 ; C23C16/458

Abstract:
Embodiments of the present disclosure are directed to a quick disconnect resistance temperature detector (RTD) heater assembly, that includes a first assembly comprising a pedestal, a pedestal shaft, an adapter, one or more heater power supply terminals, and at least one RTD, and a second assembly comprising a rotating module having a central opening, and a cable assembly partially disposed in the central opening and securely fastened to the rotating module, wherein the first assembly is removably coupled to the second assembly, wherein the cable assembly includes one or more power supply sockets that receive the heater power supply terminals when the first and second assemblies are coupled together, and wherein the cable assembly includes one or more spring loaded RTD pins that contact the at least one RTD disposed in the first assembly when the first and second assemblies are coupled together.
Public/Granted literature
- US20190032210A1 QUICK DISCONNECT RESISTANCE TEMPERATURE DETECTOR ASSEMBLY FOR ROTATING PEDESTAL Public/Granted day:2019-01-31
Information query
IPC分类: