Invention Grant
- Patent Title: Monitoring thin film deposition
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Application No.: US15026453Application Date: 2014-10-03
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Publication No.: US10704150B2Publication Date: 2020-07-07
- Inventor: Mohamed Buhary Rinzan
- Applicant: INFICON, Inc.
- Applicant Address: US NY East Syracuse
- Assignee: INFICON, Inc.
- Current Assignee: INFICON, Inc.
- Current Assignee Address: US NY East Syracuse
- Agency: Barclay Damon LLP
- International Application: PCT/US2014/059042 WO 20141003
- International Announcement: WO2015/051250 WO 20150409
- Main IPC: C23C16/52
- IPC: C23C16/52 ; C23C14/54 ; G01B7/06 ; G01R25/00

Abstract:
A system for monitoring thin film deposition is described. The system includes a quartz crystal and a synthesizer to generate a modulated signal. The modulated signal is to be grounded through the quartz crystal. The system also includes a phase detector to determine a phase of the modulated signal from the quartz crystal in order to monitor thin film deposition. A modulation index can be selected so that, at resonance, high frequency of the signal matches the crystal frequency.
Public/Granted literature
- US20160215397A1 MONITORING THIN FILM DEPOSITION Public/Granted day:2016-07-28
Information query
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