Invention Grant
- Patent Title: Method and system for electroplating a MEMS device
-
Application No.: US15383994Application Date: 2016-12-19
-
Publication No.: US10704156B2Publication Date: 2020-07-07
- Inventor: Donald Charles Abbott , Kathryn Ann Schuck
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Michelle F. Murray; Charles A. Brill; Frank D. Cimino
- Main IPC: C25D7/12
- IPC: C25D7/12 ; C25D17/00 ; C25D17/12 ; C25D17/10 ; C25D3/38 ; C25D3/48 ; C25D3/54

Abstract:
In described examples, a method for electroplating a semiconductor device includes: forming a metal foil; forming an inert anode support; attaching the metal foil to the inert anode support to form an anode; forming a cathode using a semiconductor substrate; immersing the anode and the cathode within an electrolyte solution; forming a circuit with a current source, the anode and the cathode; generating a current through the circuit; and electroplating a metal from the electrolyte solution onto the semiconductor substrate.
Public/Granted literature
- US20170175283A1 METHOD AND SYSTEM FOR ELECTROPLATING A MEMS DEVICE Public/Granted day:2017-06-22
Information query