Invention Grant
- Patent Title: Shape measuring apparatus and method for manufacturing target object to be coated
-
Application No.: US16076311Application Date: 2017-01-10
-
Publication No.: US10704898B2Publication Date: 2020-07-07
- Inventor: Hiroaki Ohba
- Applicant: NTN CORPORATION
- Applicant Address: JP Osaka
- Assignee: NTN CORPORATION
- Current Assignee: NTN CORPORATION
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@51b92978
- International Application: PCT/JP2017/000463 WO 20170110
- International Announcement: WO2017/138281 WO 20170817
- Main IPC: G01B11/24
- IPC: G01B11/24 ; G06T7/571 ; G01B9/02 ; G02B7/38 ; G06T7/73 ; G02B27/12 ; G01B11/02 ; G06T7/13

Abstract:
A shape measuring apparatus includes: a light source; a two-beam interference objective lens; an imaging device; an observation optical system; a positioning device; and a control device. The control device calculates, for each unit region in the plurality of images obtained by the imaging device, as a focus position of the unit region, a position of the two-beam interference objective lens at which a luminance-based evaluation value is maximized over the plurality of images, and the control device measures a shape of a target object based on the focus position of each unit region in the plurality of images. The control device uses, as the evaluation value, a luminance of each unit region in the plurality of images as well as a value correlated with a difference between the luminance of the unit region and luminances of a plurality of unit regions adjacent to the unit region.
Public/Granted literature
- US20190049236A1 SHAPE MEASURING APPARATUS AND METHOD FOR MANUFACTURING TARGET OBJECT TO BE COATED Public/Granted day:2019-02-14
Information query