Shape measuring device and shape measuring method
Abstract:
A shape measuring device includes a stereoscopic-shape-data generating section 212 configured to generate stereoscopic shape data indicating a shape of the measurement object with a pattern projection method, a measurement-setting automatically adjusting section 217 configured to automatically adjust measurement setting for the partial regions on the basis of at least one of stereoscopic shape data of the partial regions and light reception data acquired in the partial regions when the stereoscopic shape data is generated, and a stereoscopic-shape-data coupling section 219 configured to couple, according to the measurement setting for the partial regions adjusted by a measurement setting adjusting section, the stereoscopic shape data of the partial regions generated again by the stereoscopic-shape-data generating section 212 and generate coupled stereoscopic shape data corresponding to the coupled region.
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