- Patent Title: MEMS rotation rate sensor including combined driving and detection
-
Application No.: US15742756Application Date: 2016-05-24
-
Publication No.: US10704909B2Publication Date: 2020-07-07
- Inventor: Patrick Wellner , Burkhard Kuhlmann , Mirko Hattass
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@73568f6c
- International Application: PCT/EP2016/061720 WO 20160524
- International Announcement: WO2017/012749 WO 20170126
- Main IPC: G01C19/5719
- IPC: G01C19/5719 ; G01C19/5733

Abstract:
A rotation rate sensor including a substrate having a principal plane of extension, and a structure movable with respect to the substrate; the structure being excitable from a neutral position into an oscillation having a movement component substantially parallel to a driving direction, which is substantially parallel to the principal plane of extension. To induce the oscillation, the rotation rate sensor includes a comb electrode moved along with the structure and a comb electrode fixed in position relative to the substrate. The excitation is produced by applying a voltage to the moving comb electrode and/or to the stationary comb electrode. Due to a rotation rate of the rotation rate sensor about an axis running substantially perpendicularly to the driving direction and substantially perpendicularly to the detection direction, a force applied to the structure with a force component along a detection direction substantially perpendicular to the driving direction is detectable.
Public/Granted literature
- US20180209790A1 MEMS ROTATION RATE SENSOR INCLUDING COMBINED DRIVING AND DETECTION Public/Granted day:2018-07-26
Information query