Invention Grant
- Patent Title: MEMS triaxial magnetic sensor with improved configuration
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Application No.: US16290778Application Date: 2019-03-01
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Publication No.: US10705158B2Publication Date: 2020-07-07
- Inventor: Giacomo Laghi , Giacomo Langfelder , Gabriele Gattere , Alessandro Tocchio , Dario Paci
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seen Intellectual Property Law Group LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6a1cfcbc
- Main IPC: G01R33/02
- IPC: G01R33/02 ; G01R33/028 ; G01R33/00 ; G01R33/038

Abstract:
A MEMS triaxial magnetic sensor device includes a sensing structure having: a substrate; an outer frame, which internally defines a window and is elastically coupled to first anchorages fixed with respect to the substrate by first elastic elements; a mobile structure arranged in the window, suspended above the substrate, which is elastically coupled to the outer frame by second elastic elements and carries a conductive path for flow of an electric current; and an elastic arrangement operatively coupled to the mobile structure. The mobile structure performs, due to the first and second elastic elements and the arrangement of elastic elements, first, second, and third sensing movements in response to Lorentz forces from first, second, and third magnetic-field components, respectively. The first, second, and third sensing movements are distinct and decoupled from one another.
Public/Granted literature
- US20190195964A1 MEMS TRIAXIAL MAGNETIC SENSOR WITH IMPROVED CONFIGURATION Public/Granted day:2019-06-27
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