Invention Grant
- Patent Title: Mass flow controller and controller algorithm
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Application No.: US16116780Application Date: 2018-08-29
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Publication No.: US10705543B2Publication Date: 2020-07-07
- Inventor: John Lull , Berwin Banares , Jeffrey Whiteley
- Applicant: Illinois Tool Works Inc.
- Applicant Address: US IL Glenview
- Assignee: ILLINOIS TOOL WORKS, INC.
- Current Assignee: ILLINOIS TOOL WORKS, INC.
- Current Assignee Address: US IL Glenview
- Agency: McGuireWoods LLP
- Main IPC: G05D7/06
- IPC: G05D7/06 ; G05B17/02

Abstract:
A mass flow controller that includes a linearization system to control the linear response of a valve in order to control the gain of the mass flow controller. The linearization system includes a flow modeling system for processing at least one of a fluid type, a flow rate, a pressure, and a temperature value signal relating to flow of the fluid through a flow path and determining fluid properties. The linearization system also includes a valve modeling system to determine the required operational characteristics of the valve according to valve specifications, a desired flow rate, and the determined fluid properties. The linearization system determines a gain to control the lift of the valve in order to acquire a desired fluid flow rate. The gain is determined by calculating the derivative of predicted lift with respect to fluid flow and the derivative of drive with respect to predicted lift.
Public/Granted literature
- US20200073414A1 MASS FLOW CONTROLLER AND CONTROLLER ALGORITHM Public/Granted day:2020-03-05
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