Invention Grant
- Patent Title: Adaptive alignment methods and systems
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Application No.: US15261218Application Date: 2016-09-09
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Publication No.: US10707107B2Publication Date: 2020-07-07
- Inventor: Brent A. Riggs , William Pierson
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G01B11/27 ; G03F9/00 ; G01N21/95

Abstract:
Adaptive alignment methods and systems are disclosed. An adaptive alignment system may include a scanner configured to align a wafer and an analyzer in communication with the scanner. The analyzer may be configured to: recognize at least one defined analysis area; determine whether any perturbations exist within the analysis area; and in response to at least one perturbation determined to be within the analysis area, invoke a fall back alignment strategy or report the at least one perturbation to the scanner.
Public/Granted literature
- US20170178934A1 Adaptive Alignment Methods and Systems Public/Granted day:2017-06-22
Information query
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