The present disclosure provides a through silicon via structure and a method for manufacturing the same. The through silicon via structure includes a semiconductor substrate, a shaping film, a conductive line, a barrier layer, and an insulating layer. The shaping film is disposed over a back surface of the semiconductor substrate, and is configured to maintain a planar formation of the semiconductor substrate. The conductive line is disposed through the shaping film and in the semiconductor substrate. The barrier layer surrounds the conductive line, and the insulating layer surrounds the barrier layer.