A bond pad structure and method are provided. The structure includes a first conductive layer formed over a substrate. A second conductive layer is formed over a first portion of the first conductive layer, and a first portion of the second conductive layer forms a first capacitor electrode. A third conductive layer is formed over the first conductive layer and second conductive layer, and a first portion of the third conductive layer forms a second capacitor electrode. A second portion of the third conductive layer forms a wire bond region. A dielectric material is disposed between the first capacitor electrode and the second capacitor electrode to form a first capacitor.