Invention Grant
- Patent Title: Semiconductor device with multiple substrates electrically connected through an insulating film
-
Application No.: US15987278Application Date: 2018-05-23
-
Publication No.: US10707258B2Publication Date: 2020-07-07
- Inventor: Nobutoshi Fujii , Yoshiya Hagimoto , Kenichi Aoyagi , Yoshihisa Kagawa
- Applicant: Sony Corporation
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sheridan Ross P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5ec71de8
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L21/20 ; H01L21/768 ; H01L23/00 ; H04N5/225

Abstract:
A semiconductor device includes a first substrate having an attaching surface on which first electrodes and a first insulating film are exposed, an insulating thin film that covers the attaching surface of the first substrate, and a second substrate which has an attaching surface on which second electrodes and a second insulating film are exposed and is attached to the first substrate in a state in which the attaching surface of the second substrate and the attaching surface of the first substrate are attached together sandwiching the insulating thin film therebetween, and the first electrodes and the second electrodes deform and break a part of the insulating thin film so as to be directly electrically connected to each other.
Public/Granted literature
- US20180269248A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD Public/Granted day:2018-09-20
Information query
IPC分类: